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IMS 7f-Auto

활용도가 높은 SIMS 장비 : 대량 고속 분석과 완전 자동화를 통한 기준 검출 감도 IMS 7f-Auto는 CAMECA의 성공적인 IMS xf SIMS(이차이온 질량 분석기) 제품 라인의 최신 모델입니다. 사용 편의성 및 생산성 향상과 함께 고정밀 원소 및 동위원소 분석을 제공하는 이 모델은 유리, 금속, 세라믹, 실리콘 기반 소재, III-V 및 II-VI 디바이스, 벌크 재료, 박막 등과 같이 까다로운 응용 분야에 최적화되었으며 효율적인 디바이스 개발 및 공정 제어를 위한 산업 요건을 충족합니다.
  • 제품 개요 +


    광범위한 분석 난제를 해결하기 위한 주요 분석 기능
    IMS 7f-Auto는 우수한 깊이 분해능과 높은 다이나믹 범위를 통해 타의 추종을 불허하는 깊이방향 프로파일링 기능을 제공합니다. 고투과 질량 분석기는 2개의 고밀도 반응성 이온 소스인 O2+ 및 Cs+를 결합하여 높은 스퍼터링 속도와 탁월한 검출 한계를 제공합니다. 우수한 광학 설계로 인해 직접적인 이온 현미경 검사와 마이크로프로브 이미징 스캔이 가능합니다.

    향상된 자동화 및 운영 효율성
    IMS 7f-Auto에는 보다 빠르고 간편한 빔 튜닝과 최적화된 빔 전류 안정성을 위해 재설계된 인라인 프라이머리 칼럼이 장착되어 있습니다. 새로운 자동화 루틴은 작업자 관련 편향을 최소화하고 더욱 사용하기 쉽도록 개선되었습니다. 샘플 홀더의 자동 로드/언로드 기능이 탑재된 전동식 스토리지 챔버로 연속 분석 및 원격 운영을 통한 대량 고속 분석을 구현합니다.

    대량 고속 분석 시 높은 재현성
    IMS 7f-Auto는 새로운 전동식 스토리지 챔버와 샘플 이동으로 연속 모드 또는 원격 모드에서 여러 개의 샘플을 분석할 수 있습니다. 타의 추종을 불허하는 처리량과 재현성을 제공하면서도 완전 무인 분석 및 자동 측정이 가능합니다. 탁월한 검출 한계, 대량 고속 분석 및 높은 생산성과 함께 궁극의 재현성(RSD < 0.5%)을 구현할 수 있습니다(장비는 오퍼레이터의 개입을 최소화하면서 하루 24시간 내내 사용가능).
  • 최근 웨비나 보기 +

    • Dynamic SIMS for Ion Implants: Fundamental Concepts and Applications

      목요일, 11월 13, 2025

      A technical webinar on ion implant use for SIMS quantification and common pitfalls, co-hosted by Loughborough Surface Analysis Ltd and CAMECA.
      ON DEMAND HERE
      Click here to view
    • Optimization of carbon detection limit in Silicon using the raster change method

      수요일, 5월 10, 2023

      Seoyoun (Joan) Choi, CAMECA expert application engineer for SIMS, presents applications of the “raster change” dynamic SIMS method for measuring the carbon concentration in silicon samples.
      Duration: 14 minutes
      Click here to view
    • Lithium Diffusion In Li-Ion Battery Materials Revealed By SIMS

      화요일, 11월 15, 2022

      Learn from Dr Naoaki Kuwata, NIMS, Japan, how Secondary Ion Mass Spectrometry can be used to accurately measure lithium diffusion coefficients in Li-based thin films, supporting Li-ion battery material optimization..
      Duration: 18 minutes
      Click here to view
    • Trace Level SIMS Quantitation For Particle Accelerators

      화요일, 12월 6, 2022

      Dr Jonathan Angle reviews SIMS methodologies developed at Virginia Tech to solve mysteries specific to the characterization of SRF cavities, (predictive modeling of O diffusion, identification of contaminants from cavity furnace treatments, etc.).
      Duration: 43 minutes
      Click here to view
    • Using SIMS for materials development of high-performance solid oxide fuel cells

      수요일, 7월 20, 2022

      Katherine Develos-Bagarinao will present her most recent research projects on SOFCs using Secondary Ion Mass Spectrometry (SIMS) as a primary characterization tool.
      Duration: 27 minutes
      Click here to view
    • Application of SIMS in Solar PV Research: The Role of Hydrogen in Crystalline Silicon Solar Cells

      수요일, 2월 9, 2022

      In this webinar, Dr Di Kang will present results suggesting that, to achieve the highest passivation quality, an optimum amount of hydrogen surrounding the interfacial SiOx is needed, while insufficient or excess hydrogen can both lead to degradation of poly-Si passivation.
      Duration : 37 minutes
      Click here to view
    • The Principles of Dynamic SIMS

      월요일, 1월 6, 2020

      This free on-demand webinar is an excellent introduction to the dynamic SIMS technique. Different practical aspects are discussed:
      • Choice of primary and secondary beam species
      • Relative sensitivity for various elements
      • Matrix effects
      • Depth resolution & Lateral resolution
      • Depth profiling (choice of impact energy & sputtering rate, calibration method)
      • Scanning ion imaging mode
      A summary of dynamic SIMS main analytical characteristics is provided at the end.
      Duration : 20 minutes
      Click here to view
  • IMS 7f-Auto 활용 사례 +

  • 자료 및 연구 사례 +

  • 동영상 +

  • 과학 간행물 +


    An Excel spreadsheet compiling scientific research articles using the IMS xf (IMS 3f, 4f, 5f, 6f, 7f, IMS 7f-Auto, IMS 7f-GEO). The articles are ordered by main applications as below and are easily searchable with Excel word search functions:
    • Materials
    • Geosciences
    • Nuclears
    Download speadsheet here

    Do not hesitate to contact us at cameca.info@ametek.com if you can not access some pdf files on your own. You are also more than welcome to send us any missing references, pdf and supplements!
  • 전세계 IMS 유저 링크 +

    Several hundred CAMECA IMS 6f, 7f, 7f-Auto and 7f-GEO are installed worldwide, the list below is only a very short extract from our customer list!

    Materials Research Laboratory (MRL) at University of California Santa Barbara, USA
    Widely recognized as one of the top five materials research facilities in the world, the MRL serves as the innovation engine for discoveries in new materials.

    Nanoscale Characterization and Fabrication Laboratory, Virginia Tech, USA

    Operated by the University's Institute for Critical Technology and Applied Science (ICTAS), the Nanoscale Characterization and Fabrication Laboratory serves the needs of researchers from VirginiaTech and from the surrounding industrial community, facilitating research in nanoscale engineering and the environment, fuel cells, paleobiology... The NCFL was one the first lab in the world to be equipped with a CAMECA IMS 7f-GEO.

    Washington University in Saint-Louis (WUSTL), USA
    WUSTL’s Stable Isotope Biogeochemistry Group has been equipped with an IMS 7f-GEO since 2013. Research focuses on micro-scale variations in the C and S isotopic composition of biological and sedimentary materials, biogeochemical interactions between microbes and their environment.

    CalTech Center for Microanalysis, USA

    The Center for Microanalysis at Caltech houses a IMS 7f-GEO and a NanoSIMS 50L, providing expertise for microanalysis of geological, meteoritic and synthetic materials. Research projects carried out at CCM are most varied, ranging from cosmochemistry to experimental studies on climate change, geochronology, in-situ studies of microbial communities, materials science engineering...

    University of Manitoba, Manitoba Regional Materials and Surface Characterization Facility, Canada
    Equipped with a CAMECA IMS 7f and several other instruments for materials characterization, the Manitoba Regional Materials and Surface Characterization Facility provides a unique resource to regional government and industrial researchers and enables world-class research into the chemical, structural and morphological nature of surfaces and bulk materials.

    Helmholtz Zentrum Dresden Rossendorf, Germany
    The CAMECA IMS series instrument in Rossendorf is coupled to an accelerator mass spectrometer at the core of the "Super-SIMS" initiative of the Helmholtz Institute Freiberg for Resource Technology.

    Ioffe Institute, St Petersburg, Russia
    The Ioffe Institute is one of Russia's largest institutions for research in physics and materials. Under leadership from Boris Ber, the Surface Analysis Group applies various IMS microprobes to investigations of coatings, thin films and various semiconductor structures.

    University of Edinburgh, Scotland, UK
    The School of Geoscience at University of Edinburgh is one of the largest and most successful groupings of geographers, Earth and environmental scientists in the UK. It is equipped with various CAMECA ion microprobes including an IMS 7f-GEO.

    GEMAC Univ. Versailles, France
    The GEMAC laboratory is equipped with an IMS 7f model used to investigate and develop materials, nanostructures and prototypes of elementary devices for electronics and optoelectronics.

    CIM PACA, Arcsis, France
    Located in the South East of France, a basin for semiconductor production, CIM PACA is the flagship characterization platform of ARCSIS, a consortium that unites world-ranking semiconductor groups including Philips, STMicroelectronics, Texas Instruments etc... as well as several dozens of small and mid-size companies, engineering schools, research laboratories and universities of the region. CIM-PACA is dedicated to the design, test and validation of new semiconductor technologies.

    CC-MEM, Institut Jean Lamour / Ecole des Mines de Nancy, France
    The Centre de Compétences en Microscopie Electronique et Microsondes (CC-MEM) is a collaborative research facility hosted by the Ecole des Mines de Nancy. The IMS 7f delivered in 2009 at CC-MEM contributes to cutting-edge research in material sciences, metallurgy, nanosciences.

    Cinvestav, Seccion de electronica del estado solido, Mexico
    Created in 1961, Cinvestav (Advanced Studies Center of the National Polytechnic Institute of Mexico) is a leader institution in research and postgraduate education in Mexico and the world

  • 소프트웨어 +

    • SmartPro news
      SmartPRO

      The new SmartPRO software package for CAMECA IMS 7f-Auto, IMS Wf and SC Ultra Secondary Ion Mass Spectrometers combines Chain Analysis and WinCurve in a seamlessly integrated environment and adds real time data processing and automation functionalities thus improving ease of use, productivity and data quality.

      Keep Reading

    • WinCurve dataprocessing sofware
      WinCurve

      CAMECA SIMS 장비용으로 특별히 개발된 WinCurve는 사용자 친화적인 환경에서 강력한 데이터 처리 및 시각화 기능을 제공합니다.

      Keep Reading

    • WinImage Software
      WinImage II

      CAMECA SIMS 기비용으로 특별히 개발된 WinImage II는 PC-Windows™ 환경에서 강력한 이미지 시각화, 처리 및 인쇄 기능을 제공합니다

      Keep Reading

    • APM Software
      APM

      Automated Particle Measurement(APM)은 수백만 개 입자의 빠른 스크리닝, 입자 검출 및 동위원소 특성화 분석을 가능하게 해주는 CAMECA 소프트웨어 도구입니다.

      Keep Reading

  • 업그레이드 키트 +

    Specific to IMS 6f users: extend the lifetime of your instrument with our IMS 6f overhaul program:
    IMS 6f ion microprobes are robust, but old instruments whose electronic components are becoming obsolete. To minimize the risk of long, non-scheduled downtime, CAMECA  offers an IMS 6f overhaul program, that will fully rejuvenate your instrument with a complete new electronics system, pumping and vacuum, new hardware, full automation, user-friendly acquisition and processing software, etc...
    Download the IMS 6f-E7 upgrade flyer for all details of this upgrade and its benefits in terms of performance, productivity, ease-of-use, and of course, uptime and sustainability.


    To view upgrade options available for IMS 6f-E7 and 7f, click on either of the components below:
    Automation & Software
    Sources
    Airlock
    Specimen Chamber
    Optical System
    Vacuum
    Automation & Software

    PC-Automation (7f equipped with SUN workstation)
    PC automation system to replace SUN system, allows full automation & unattended operation and greatly improves performance and throughput.

    Post-treatment Station (6f-E7/ 7f)
    PC computer for off-line data processing (CAMECA software not included).

    Desk Control Duplication (7f with PC-Automation / 6f-E7)
    Instrument control from an operator room. Ensures optimized operation comfort when the lab is split in two parts.

    APM Software Licence (PC-Automation / 6f-E7 /7f with PC-Automation)
    Automated Particle Measurement software program for fast screening of large numbers of particles and detection of specific elements or isotopes. More information.

    WinCurve Software Licence (offline) (7f / 6f-E7)
    Offers powerful SIMS data processing & graphing capabilities. More information.

    WinImage II Software Licence (offline) (7f / 6f-E7)
    Offers powerful SIMS image processing capabilities. More information.

    Top of page

    Sources

    Cs Ion Source Isolation (7f with PC-Automation)
    Isolation and Pumping of the Cesium Microbeam Source.

    Duo Accel/Decel (7f with PC-Automation)
    Low primary ion energy system for the duoplasmatron source.

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    Airlock

    Storage Chamber Upgrade (7f with PC-Automation / 6f-E7)
    Manual storage chamber with its load-lock designed to store up to six sample holders under high vacuum. Ensures substantial throughput improvements for applications that depend on the best UHV conditions. 

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    Specimen chamber

    Z-Motion (7f with PC-Automation / 6f-E7)
    Z-Axis manual adjustment for the sample stage.

    Turbospectro upgrade (7f with PC-Automation / 6f-E7)
    Turbomolecular pumps for the mass spectrometer (to replace the existing ion pumps, for optimized pumping speed in the mass spectrometer and improved abundance sensitivity while using the oxygen flooding.

    Digital Video Camera (7f with PC-Automation / 6f-E7)
    Numerical camera and LED sample illustration system (white light).

    EPS (7f with PC-Automation)
    Electrical isolation of the magnet flight tube in order to allow fast mass peak switching.

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    Secondary Optical System

    EM Detector Post-accelaration (7f with PC-Automation)
    Postacceleration for the electron multiplier detector. Increases sensitivity when analysing heavy elements and when running the mass spectrometer at low secondary extraction voltage (<3 kV).

    Vacuum

    Pfeiffer Turbopump 7f
    Peiiffer Turbopump 6fe7